Title:
DIAGNOSTIC METHOD FOR CARRIER GAS PRESSURE REGULATION SYSTEM
Document Type and Number:
Japanese Patent JP3227509
Kind Code:
B2
Abstract:
PURPOSE: To specify the faulty part upon the occurrence of abnormality by detecting the abnormality of carrier gas pressure regulation system based on a pressure value detected through a pressure sensor and the driving state of solenoid supply and discharge valves detected through drive monitoring means.
CONSTITUTION: A VL operation counter 24 detects the number of driving time of a solenoid supply valve 22 and a VH operation counter 25 detects the number of driving times of a solenoid discharge valve 23. Based on the number of operating times of solenoid valves 22, 23 detected through the VL operation counter 24 and the VH operation counter 25 and a detection signal PV from a pressure sensor 2, the timing for replacing each solenoid valve is determined and the clogging or leakage of piping is detected. Furthermore, the leakage state of a pressure reducing valve 1 is grasped by measuring the variation in the detection signal PV from the pressure sensor 2 per predetermined number of driving times for the solenoid valve 22, 23 thus deciding pass/fail of the carrier gas pressure regulation system at the time of manufacture.
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Inventors:
Hajime Ohta
Application Number:
JP7618095A
Publication Date:
November 12, 2001
Filing Date:
March 31, 1995
Export Citation:
Assignee:
YAMATAKE CORPORATION
International Classes:
G01N30/32; (IPC1-7): G01N30/32
Attorney, Agent or Firm:
Masaki Yamakawa
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