Title:
DIAPHRAGM AND ITS PRODUCTION PROCESS
Document Type and Number:
Japanese Patent JP2007274096
Kind Code:
A
Abstract:
To provide a diaphragm in which the internal force by residual stress is controlled with high precision, and to provide its production process and a capacitor microphone employing that diaphragm.
The diaphragm comprises a central layer composed of a single layer film, a first coating layer bonded to the surface of the central layer, and a second coating layer bonded to the rear surface of the central layer on the side opposite to the surface.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
SUZUKI YUKITOSHI
SUZUKI TAMITO
SUZUKI TAMITO
Application Number:
JP2006094414A
Publication Date:
October 18, 2007
Filing Date:
March 30, 2006
Export Citation:
Assignee:
YAMAHA CORP
International Classes:
H04R19/04; H01L29/84; H04R7/06; H04R31/00; G01P15/125
Attorney, Agent or Firm:
Masaki Hattori