To provide a diaphragm pump which can pressure-feed by a small force feed amount, in particular, whose structural dimension of diaphragm enables simple and inexpensive manufacture and location adjustment of component parts.
The diaphragm pump 1 has ring-shaped working chambers 6 and ring-shaped diaphragms 3. Outer peripheral ranges 12 are tightened and fixed to inner edge ranges 13, and both tightening and fixing portions are immobilized mutually and relatively. Drive elements 8 are connected with a pump drive device to act between the both tightening and fixing portions for displace the diaphragm. The drive element is formed in a sleeve shape or a ring shape having a diameter approximately corresponding to the working chamber 6 on a side facing the diaphragm. A ring-shaped end face of the drive element 8 acts on a side facing the pump drive device of a ring diaphragm in a direction orthogonal to a diaphragm flat surface.
KISSLING CHRISTIAN
| JPH11257251A | 1999-09-21 | |||
| JPH06235381A | 1994-08-23 | |||
| JP2000459501A | ||||
| JPH1068383A | 1998-03-10 | |||
| JPS61160666A | 1986-07-21 |
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel