To provide a diaphragm pump with stable pump efficiency.
The diaphragm pump 10 is provided with an insertion part for inserting and retaining a connection part 33 of a movable element 30; a meandering spring part formed so as to be meandered from the insertion part in a radial direction of the movable element 30; and an outer peripheral mounting part provided on an end of the meandering spring part and fixed to a spring fixing part 212A of a case 20. The diaphragm pump 10 is provided with a spring member 50 in which the insertion part, the meandering spring part and the outer peripheral mounting part are arranged on a spring formation surface approximately crossing to an axis of the movable element 30. Therefore, since the insertion part is supported approximately on the axis of the case 20 by the meandering spring part and movement in a direction that the meandering spring part is provided is restricted, movement in a radial direction of the movable element 30 is restricted and deviation of the axis of the movable element 30, inclination and contact with an electro-magnet part can be prevented. Accordingly, the movable element 30 can be stably vibrated on the axis and the pump efficiency of the diaphragm pump 10 can be stabilized.
YAMAGISHI KAZUYA
SAKAGUCHI SHINICHI
ASAMA KIICHI
Kanji Nakayama
Tsuyoshi Ishizaki