Title:
DIAPHRAGM VALVE
Document Type and Number:
Japanese Patent JP2010121689
Kind Code:
A
Abstract:
To provide a diaphragm valve capable of further suppressing an electrostatic breakdown of a diaphragm 21.
An electric conductor film 25 such as carbon is formed, for example, in a spiral shape having no adverse influence on the movement of the diaphragm 21, on a surface on the side of not contacting with liquid of the diaphragm 21. The outer end of the electric conductor film 25 is connected to a leader electric conductor film 23 formed on an upper surface of a diaphragm holding member 22, and a grounding electric conductor film 24 is connected to this leader electric conductor film 23, and the grounding electric conductor film 24 is extended up to a bottom surface along a side surface of a body 10.
More Like This:
JP4190866 | Flow control device |
JP5364051 | Fluid control valve |
JP3990567 | Diaphragm valve, board processing unit and board processing equipment |
Inventors:
NISHIDA YUICHI
Application Number:
JP2008295098A
Publication Date:
June 03, 2010
Filing Date:
November 19, 2008
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
F16K7/17; F16J3/02; F16K31/122; F16K41/10
Domestic Patent References:
JP2001317658A | 2001-11-16 | |||
JP2007078019A | 2007-03-29 | |||
JP2002168176A | 2002-06-14 | |||
JP2008115899A | 2008-05-22 | |||
JP2007239918A | 2007-09-20 | |||
JPS63155232U | 1988-10-12 | |||
JP2009024749A | 2009-02-05 |
Attorney, Agent or Firm:
Toshio Inoue
Tomoaki Miida
Tomoaki Miida