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Title:
DIAPHRAGM VALVE
Document Type and Number:
Japanese Patent JP2010121689
Kind Code:
A
Abstract:

To provide a diaphragm valve capable of further suppressing an electrostatic breakdown of a diaphragm 21.

An electric conductor film 25 such as carbon is formed, for example, in a spiral shape having no adverse influence on the movement of the diaphragm 21, on a surface on the side of not contacting with liquid of the diaphragm 21. The outer end of the electric conductor film 25 is connected to a leader electric conductor film 23 formed on an upper surface of a diaphragm holding member 22, and a grounding electric conductor film 24 is connected to this leader electric conductor film 23, and the grounding electric conductor film 24 is extended up to a bottom surface along a side surface of a body 10.


Inventors:
NISHIDA YUICHI
Application Number:
JP2008295098A
Publication Date:
June 03, 2010
Filing Date:
November 19, 2008
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F16K7/17; F16J3/02; F16K31/122; F16K41/10
Domestic Patent References:
JP2001317658A2001-11-16
JP2007078019A2007-03-29
JP2002168176A2002-06-14
JP2008115899A2008-05-22
JP2007239918A2007-09-20
JPS63155232U1988-10-12
JP2009024749A2009-02-05
Attorney, Agent or Firm:
Toshio Inoue
Tomoaki Miida