Title:
DIAPHRAGM VALVE
Document Type and Number:
Japanese Patent JPH06159529
Kind Code:
A
Abstract:
PURPOSE: To facilitate precise surface finishing in a part metal O-ring and to prevent an external leak from a diaphragm clamped part.
CONSTITUTION: In a diaphragm seal mechanism, instead of dispensing with a conventional circular groove, a flat face 8 is provided in the uppermost part of a body 1 while a metal O-ring spacer 2 is parallelly arranged on the inner circumference side of a metal O-ring 5, and a diaphragm 3 is nipped by the body 1 and a lid 4, so that a nipped part of the diaphragm circumferential edge is sealed.
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Inventors:
ISHIKAWA MAKOTO
Application Number:
JP31070192A
Publication Date:
June 07, 1994
Filing Date:
November 20, 1992
Export Citation:
Assignee:
HITACHI METALS LTD
International Classes:
F16K7/16; F16K41/12; (IPC1-7): F16K7/16; F16K41/12
Attorney, Agent or Firm:
Oba Mitsuru
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