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Title:
DICING APPARATUS WITH INTERLOCK
Document Type and Number:
Japanese Patent JP2002343746
Kind Code:
A
Abstract:

To provide a dicing apparatus that can prevent the closing of one of halved flange covers from being forgotten, can prevent the removal of a blade attaching/detaching tool from being forgotten, and can prevent the attachment of a blade from being forgotten when the blade is to be exchanged.

A flange cover 36 for covering a blade 18 is divided into two, and the first divided cover 40 is rotated freely. When the first cover 40 is at a closing position, a blade attaching/detaching tool 60 cannot be attached. In addition, when the blade attaching/detaching tool 60 is being attached, the first cover 40 is set to the closing position so that the first cover 40 cannot be rotated. In addition, an interlock apparatus for preventing operation from being started is provided when the quantity of light detected by a blade damage detector 50 being attached to the first cover 40 has not decreased by a specific quantity.


Inventors:
ADACHI TEI
AZUMA MASAYUKI
KANEKO TAKAYUKI
Application Number:
JP2001143504A
Publication Date:
November 29, 2002
Filing Date:
May 14, 2001
Export Citation:
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Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
H01L21/301; B23D59/00; B28D5/00; B28D5/02; F16P7/00; (IPC1-7): H01L21/301
Attorney, Agent or Firm:
Kenzo Matsuura



 
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