Title:
DICING DEVICE
Document Type and Number:
Japanese Patent JP2002343745
Kind Code:
A
Abstract:
To provide a dicing device whose blade can be replaced easily without trouble and which can meet an automatic replacing system of a rotary blade.
A flange cover 36 covering a blade 18 is divided into two, a divided second cover 40 is rotatably connected with a divided first cover 38 via a shaft 42 parallel with a rotation axis 18A of the blade 18, and the second cover 40 is opened and closed interlocking with a vertical movement of a spindle 26. With such a constitution, if the spindle 26 is elevated when the blade 18 is replaced, the second cover 40 is automatically turned to an open position and L-shaped cooling water jet nozzles 20 and 20 retreat to side parts from lower parts of the blade 18, so that the blade 18 can be replaced.
Inventors:
ADACHI TEI
AZUMA MASAYUKI
KANEKO TAKAYUKI
AZUMA MASAYUKI
KANEKO TAKAYUKI
Application Number:
JP2001143489A
Publication Date:
November 29, 2002
Filing Date:
May 14, 2001
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B23D45/02; B23D59/00; H01L21/301; B28D5/00; B28D5/02; (IPC1-7): H01L21/301
Attorney, Agent or Firm:
Kenzo Matsuura