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Patent Searching and Data


Title:
DICING BLADE
Document Type and Number:
Japanese Patent JPH06188308
Kind Code:
A
Abstract:

PURPOSE: To provide a dicing blade wherein its cutting capability is not lowered, it can remove cuttings or the like sufficiently and it does not lower the quality of a semiconductor element chip when the semiconductor element chip is cut off from a wafer.

CONSTITUTION: Blade grooves 24 are formed at a prescribed pitch on both faces of a cutting blade 23 formed in a ring shape at the outer circumferential part of a dicing blade 20 toward its radial direction and in its peripheral direction. Pure water for cooling and cleaning creeps sufficiently to a cutting part via the blade grooves 24, the cutting blade 23 is cooled sufficiently, and cuttings or the like can be removed sufficiently from the cutting part.


Inventors:
NISHINAKA YOSHIRO
Application Number:
JP34072792A
Publication Date:
July 08, 1994
Filing Date:
December 21, 1992
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B28D5/00; H01L21/301; H01L21/78; (IPC1-7): H01L21/78; B28D5/00
Attorney, Agent or Firm:
Soga Doteru (6 people outside)