Title:
Dielectric material, an electrostatic chuck device
Document Type and Number:
Japanese Patent JP6103046
Kind Code:
B2
Abstract:
A dielectric material includes a composite sintered body in which conductive particles are dispersed in an insulating material, in which a dielectric constant at a frequency of 40 Hz is 10 or higher, and a difference between a maximum dielectric loss value and a minimum dielectric loss value at a frequency of 1 MHz in a surface of the composite sintered body is 0.002 or less.
Inventors:
Masayuki Ishizuka
Dairou Nagatomo
Dairou Nagatomo
Application Number:
JP2015515734A
Publication Date:
March 29, 2017
Filing Date:
March 09, 2015
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
C04B35/117; C04B35/505; H01B3/12; H01L21/683
Domestic Patent References:
| JP2003152065A | ||||
| JP2003040674A | ||||
| JP2000107969A | ||||
| JP2013258429A | ||||
| JP2001130968A | ||||
| JP2007051045A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Tadashi Takahashi
Suzuki Mitsuyoshi