Title:
DIFFERENTIAL PRESSURE SENSOR AND FLOWMETER
Document Type and Number:
Japanese Patent JP2008128979
Kind Code:
A
Abstract:
To provide a differential pressure sensor usable favorably even in combustion gas or the like, and allowing precise measurement by simple constitution.
This differential pressure sensor outputs, as a detection result, an electrification quantity in a balance position between an external force for displacing a movable member 5 to a position detecting part 4 side in response to a differential pressure generated between pressure chambers 1a, 1b, and an electromagnetic force for returning the movable member 5 generated by an electromagnetic coil 8 with the electrification quantity in response to electric resistance of a position detecting part 4 varied by a contact degree with the movable member 5.
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Inventors:
TSUMURA TAKASHI
Application Number:
JP2006317547A
Publication Date:
June 05, 2008
Filing Date:
November 24, 2006
Export Citation:
Assignee:
YAMATAKE CORP
International Classes:
G01L13/00
Attorney, Agent or Firm:
Hideaki Tazawa
Konobu Kato
Hamada Hatsune
Konobu Kato
Hamada Hatsune