Title:
DIFFRACTION INTERFERENCE MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH1123452
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable the fractional measurement of extinction and phase changes due to a sample by controlling the thickness of volume grating or a modulation ratio of permittivity and eliminating effects of phase differences. SOLUTION: A beam splitter 3 divides incident light into a luminous flux A of p-polarized light and a luminous flux B of s-polarized light. The luminous flux A passes through a polarizer 5, is converted into s-polarized light, and become incident on a volume grating 1. The luminous flux B is reflected at a mirror 6 and become incident on the volume grating 1 as of s-polarized light. A sample S is placed in the optical path of the luminous flux B. The luminous fluxes A and B emitted from the volume grating 1 are each detected by detectors D1 and D2 . A computer performs data processing on the outputs of the detectors D1 and D2 . The volume grating 1 is driven in directions of arrows under the control of the computer 7. In this arrangement, each part is set so that the Bragg reflection may occur to the two luminous fluxes A and B by the volume grating 1.
Inventors:
YAMAHIRO TOMOHIKO
HIRAGA KOICHI
HIRAGA KOICHI
Application Number:
JP19796097A
Publication Date:
January 29, 1999
Filing Date:
July 08, 1997
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01J9/00; G01N21/27; G01N21/45; (IPC1-7): G01N21/27; G01J9/00; G01N21/45
Attorney, Agent or Firm:
Kosuke Agata
Previous Patent: ATTENUATED TOTAL INTERNAL REFLECTION MEASURING DEVICE
Next Patent: SEMICONDUCTOR INTEGRATED CIRCUIT
Next Patent: SEMICONDUCTOR INTEGRATED CIRCUIT