Title:
DIFFRACTIVE OPTICAL ELEMENT AND MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2019090819
Kind Code:
A
Abstract:
To provide a method of determining deviation of an actual shape of an optical surface of an optical element from an intended shape.SOLUTION: A diffractive optical element 50 is provided, comprising a substrate 52 and a diffractive structure pattern 54 arranged thereon. The diffractive structure pattern is configured to convert a plane or spherical input wave 42 radiated thereon into at least four separate output waves, of which at least one is an aspherical wave 56, at least another one is a spherical wave 58, and at least two others respectively are either a plane wave 60, 60or a spherical wave.SELECTED DRAWING: Figure 2
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Inventors:
JOCHEN HETZLER
Application Number:
JP2018243265A
Publication Date:
June 13, 2019
Filing Date:
December 26, 2018
Export Citation:
Assignee:
ZEISS CARL SMT GMBH
International Classes:
G01B11/24; G01M11/00; G02B5/18
Domestic Patent References:
| JP2012517707A | 2012-08-02 | |||
| JP2005025199A | 2005-01-27 | |||
| JP2000267295A | 2000-09-29 | |||
| JPH05333438A | 1993-12-17 | |||
| JPH04336090A | 1992-11-24 |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Groundwork Kenichi