Title:
円盤状基板の研磨装置、研磨用ブラシ
Document Type and Number:
Japanese Patent JP4252084
Kind Code:
B2
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Inventors:
Kazuyuki Haneda
Watanabe
Yosuke Sato
Watanabe
Yosuke Sato
Application Number:
JP2006296112A
Publication Date:
April 08, 2009
Filing Date:
October 31, 2006
Export Citation:
Assignee:
SHOWA DENKO K.K.
Citizen Seimitsu Co., Ltd.
Citizen Seimitsu Co., Ltd.
International Classes:
B24B29/00; B24B5/06; B24B29/04; B24B57/02; B24B9/00
Domestic Patent References:
| JP2006015450A | ||||
| JP63180454A | ||||
| JP2006088321A | ||||
| JP11221742A | ||||
| JP2006192539A | ||||
| JP2001162510A | ||||
| JP2006007350A | ||||
| JP2006236561A | ||||
| JP2000127005A | ||||
| JP2000042893A |
Attorney, Agent or Firm:
Jiro Kobe