Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DISPLACEMENT INFORMATION DETECTING DEVICE, DRIVE CONTROL DEVICE USING THE DETECTING DEVICE, AND SCALE DEVICE
Document Type and Number:
Japanese Patent JPH08271287
Kind Code:
A
Abstract:

PURPOSE: To provide a displacement information detecting device which can be made small in size without the deterioration of the accuracy in detection, a drive control device using the detecting device, and a scale device being suitable for the displacement information detecting device, in an apparatus wherein optical systems based on different principles of detection are provided together.

CONSTITUTION: In an apparatus wherein the information on rotation of a scale member D is detected by detecting the information on the interference of diffracted light generated by radiating a light flux to a diffraction grating GT provided on the scale member D, a constitution for detecting light from data recording parts Z1, Z2, U, V and W so as to detect the information on rotation of the scale member D is provided separately and the diffraction grating GT and the data recording parts Z1, Z2, U, V and W on the scale member D are formed by different manufacturing methods.


Inventors:
ISHIZUKA AKIRA
Application Number:
JP7579095A
Publication Date:
October 18, 1996
Filing Date:
March 31, 1995
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
G01D5/36; G01B11/00; G01B11/26; G01D5/38; G11B7/00; G11B7/005; G11B19/06; G11B19/20; (IPC1-7): G01D5/38; G01B11/00; G01B11/26; G01D5/36; G11B7/00; G11B19/06; G11B19/20
Attorney, Agent or Firm:
丸島 儀一