Title:
DRYER AND HEAT TREATMENT SYSTEM
Document Type and Number:
Japanese Patent JP2018044724
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technology of reducing heat radiation from a housing supporting a heat element to the outside.SOLUTION: A dryer 40 is configured to dry a coating film formed on a substrate 5. The dryer 40 includes: an infrared heater 42 configured to radiate heat in a -z direction as a first direction; a housing part 44 supporting the infrared heater 42 on its inside; an outer wall part 46 covering an outer surface of the housing part 44 so as to form an interval 40S between the housing part 44 and the outer surface, and forming an opening 46op communicating with the internal 40S; and a discharge part 50 configured to discharge atmosphere of the interval 40S between the housing part 44 and the outer wall part 46. The opening 46op formed by the outer wall part 46 faces to the -z direction.SELECTED DRAWING: Figure 3
Inventors:
ICHIBE NOBUO
Application Number:
JP2016180290A
Publication Date:
March 22, 2018
Filing Date:
September 15, 2016
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F26B13/10; F26B3/30
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita