To obtain a drying device for solar cell printing capable of drying components of the solar cell printed on a wafer in a short time while saving energy and narrowing an occupation area.
In the drying device, four heating parts 10-1 to 10-4 heating the wafer to which paste is applied and having electric heaters arranged inside and three heating metallic plates juxtaposed at predetermined intervals are arranged horizontally. A plurality of air suction holes for sucking and holding wafer are provided on the heating metallic plates. Two carrying bars 20a, 20b supporting and carrying the wafer to which the paste is applied, inserted to two air gaps between the three heating metallic plates and including a plurality of air suction holes for sucking and holding wafer are arranged. The wafer supported by the two carrying bars 20a, 20b is moved by a predetermined distance horizontally and vertically.
WO/1993/023970 | INDUCTION DRYER AND MAGNETIC SEPARATOR |
JP2007044025 | FUMIGATING/DRYING MACHINE FOR DRIED PERSIMMON |
JPH0650661 | VACUUM DRYER |
Masahiro Tanaka
Next Patent: AIR CONDITIONER CONTROL METHOD IN INFORMATION COMMUNICATION MACHINE ROOM