To dry a coating formed on a substrate uniformly by shaking a substrate held at a drying position in a tact transfer furnace for transferring the substrate between drying positions by means of a shaking mechanism.

A coating is dried by heating a substrate by means of a heater 21. Air is sucked through a duct into a furnace and the air containing a volatile solvent is discharged through a duct 22 to the outside. When the substrate is carried in to the lower stage of a drying furnace 20, the substrate carried onto the roller 12 of a frame 11 is carried, as it is, onto a carry roller 23 at the lower stage of the drying furnace 20. When the substrate is carried onto the upper stage of the furnace 20, the frame 11 is moved to an ascending position if the substrate is present on the roller 12 and the substrate is carried onto a carry roller 23 at the upper stage of the furnace 20. Fluctuation in the plane of the substrate caused by presence/absence of a rear surface holding mechanism, i.e., the carry roller, can be suppressed by shaking the substrate at the drying position thus realizing uniform drying of coating.