Title:
DUST CLEANER AND DUST CLEANING METHOD FOR EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP3533380
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a small and inexpensive dust cleaner and a dust cleaning method for exposure device, cleaning the dust of a substrate and an original plate simply, reliably and efficiently.
SOLUTION: An original plate 12 is cleaned, on the way to carry the substrate 11 into a exposing part 21, by a cleaning roller 16 mounted on a carry-in carrier 14 and the substrate 11 is cleaned by bringing the cleaning roller 16 into contact with the substrate 11 on the way to return.
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Inventors:
Toyoda, Seiichiro
Application Number:
JP2001174199A
Publication Date:
May 31, 2004
Filing Date:
June 08, 2001
Export Citation:
Assignee:
Toyoda, Seiichiro
ONO SOKKI CO LTD
ONO SOKKI CO LTD
International Classes:
B08B1/04; H05K3/00; G03F7/20; (IPC1-7): G03F7/20; B08B1/04; H05K3/00
Attorney, Agent or Firm:
鎌田 久男