Title:
DUST-REMOVING BOARD FOR SEMICONDUCTOR
Document Type and Number:
Japanese Patent JP2006087977
Kind Code:
A
Abstract:
To provide a dust-removing board for semiconductors being usable at high temperatures and even under conditions possibly causing serious troubles due to the contamination of silicones e.g. in applications of HDD and some applications of semiconductors and having high heat resistance.
The board for semiconductors has a polyimide resin layer containing structural units of a butadiene-acrylonitrile copolymer partly in the principal chain on at least one side of the board.
Inventors:
FUJII HIROFUMI
UENDA DAISUKE
MARUOKA NOBUAKI
UENDA DAISUKE
MARUOKA NOBUAKI
Application Number:
JP2004273464A
Publication Date:
April 06, 2006
Filing Date:
September 21, 2004
Export Citation:
Assignee:
NITTO DENKO CORP
International Classes:
H01L21/02; B08B1/00; H01L21/304; H01L21/3065; H01L21/677; H01L21/205
Attorney, Agent or Firm:
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Yuriko Hamada
Hironori Honda
Toshimitsu Ichikawa
Takeshi Takamatsu
Yuriko Hamada