Title:
DYNAMIC QUANTITY SENSOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3636534
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce influence from interface reaction and contrive high sensitivity and high output of sensor output by forming a strain sensitive resistor composed of two layers of a high resistance value layer and a low resistance value layer on the surface of an insulating board.
SOLUTION: A metal substrate 1 forming an insulating layer 2 composed of crystallization glass on the surface is made an insulating board 3, two kinds of strain sensitive resistor layers 5, 6 are overlapped and formed on the surface of the insulating board 3. The change of the resistor values of each resistor layer is detected with a pair of electrodes 4 connected to both ends of each resistor layer. The resistor layer 5 at the side abutted to and formed on the insulating board 3 works as a sensitive part, and serves as a reaction suppression layer because influence of the reaction layer produced in baking does not extend to the resistor layer 6 of the upper side. Thus, the resistor layer 6 stably operates as the sensitive part. At this time, the electric resistance of the resistor layer 5 is made higher than that of the resistor layer 6. Thereby the resistor layer 6 is a main electric conductance layer, and influence of the sensitive layer influenced on sensor output can be lessened to the utmost.
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Inventors:
Yoshihiro Hori
Haruhiko Handa
Shinya Hasegawa
Masaki Ikeda
Haruhiko Handa
Shinya Hasegawa
Masaki Ikeda
Application Number:
JP8531096A
Publication Date:
April 06, 2005
Filing Date:
April 08, 1996
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01L1/22; G01L9/00; G01L9/04; G01P15/12; H01C17/06; H01L29/84; (IPC1-7): G01L1/22; G01P15/12; H01C17/06; H01L29/84
Domestic Patent References:
| JP6137971A | ||||
| JP58118931A |
Attorney, Agent or Firm:
Kazuo Ishii