To facilitate the work for mounting/demounting an edge sensor on/ from a probe by employing a protruding part from the film of a wiring pattern as a contact detection pin and providing a supporting detection pin projecting less than the contact detection pin and coming into contact with an object and the contacting face side of the contact detection pin.
The supporting detection pin 3c of an edge sensor has an intermediate part being bent substantially perpendicularly to a contact detection pin and the protrusion from a resin film 2 is set smaller than that of a detection pin 3b. When a probe is brought close to a semiconductor chip 1, the protruding part 3ba of the pin 3b is brought into contact with a water (object to be detected) and raised and the contact part 3ca between a contact face Ha and the pin 3c is released. consequently, the distance between the probe and the chip 1 is detected and the contact pressure of a contact pin 3a against a pad is lessened. Since the protruding parts of a wiring pattern 3 formed on the film 2 in a sensor 15 serve as the detection pins 3b-3d, fixing, removal and positions can be facilitated using a supporting member 30 for the film 2, and the like, thus facilitating replacement of the sensor unit 15.
ISHII TOSHINORI
TAI AKIRA
YOSHIDA HIDEAKI
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