PURPOSE: To obtain the sensor which senses pressure variation in a low pressure range of, for example, 0 to 1 inch water pressure.
CONSTITUTION: An electrostatic capacity type elastomer pressure sensor 10 includes a peak-fitted plate 12 and a bottom-fitted plate 16 which are arranged supporting a couple of electrode layers 54. On the top surface of a dielectric disk 52 gripped by the top-peak fitted plate 12, a 1st electrode layer 24 is supported. A 2nd electrode layer is positioned below the dielectric disk 52 and and includes a conductive elastomer layer superposed on an elastomer support layer. In a preferable practical example, elastomer is silicone elastomer. The conductive layer is formed by mixing carbon powder with the silicone. In the most preferable example, the elastomer layer is predeformed for temperature compensation.
POORU EDOWAADO TOMA
GERII FURANSHISU OOMAAN
KAARU FUREDERITSUKU KURAIN
POORU HARORUDO FUROOFURINGU
SUKOTSUTO RII SUPENSU
IBUSHIN IIFUIN
AASAA BARUUSHIYAN
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