Title:
ELECTRIC CHARACTERISTICS EVALUATION METHOD
Document Type and Number:
Japanese Patent JP3628192
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the evaluation time and to improve the evaluation accuracy by calculating the mobility of carriers at a lattice point using one of two electric field parameters extracted through a first or a second extracting process, and extracting electric characteristics at the lattice point.
SOLUTION: On the basis of information from an electric field/electrons (holes)/current calculating section 12 and an evaluating position recognizing section 13, an electric field parameter extracting section 14 extracts electric field parameters in order to calculate the mobility of carriers within a semiconductor element. Using the extracted parameters, a mobility calculating section 15 calculates the mobility of the carriers. Using the calculated mobility, a coefficient matrix setting section 16 sets a coefficient matrix. Using the set coefficient matrix, an electrical characteristics calculating section 17 calculates electrical characteristics at a lattice point. As a result of this construction, the evaluation time can be reduced, and the evaluation accuracy can be improved.
Inventors:
Hiroyoshi Tanimoto
Toshiyuki Toda
Toshiyuki Toda
Application Number:
JP35810098A
Publication Date:
March 09, 2005
Filing Date:
December 16, 1998
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L29/00; G06F17/50; H01L21/00; (IPC1-7): H01L29/00; G06F17/50; H01L21/00
Domestic Patent References:
| JP3313281B2 | ||||
| JP3534255B2 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
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