Title:
POLISHING DEVICE
Document Type and Number:
Japanese Patent JP3628193
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a polishing device which can maintain the flatness without making the surface form in a convex form, as well as can improve the surface coarseness by the polishing.
SOLUTION: A carrier 4 has a carrier main body 7 having a housing recess 6 whose lower side is opened; an elastic membrane 9 provided to form a pressurizing chamber 8 to the housing recess 6; a pressure transmitting medium 10 provided at the opposite side of the pressurizing chamber 8 making the elastic membrane 9 at the center; and a retainer 11 provided at the periphery of the pressure transmitting medium 10 and holding a work W. And the pressure transmitting medium 10 has a divergent form to expand its cross section gradually, and its bottom surface part 10d has a plane form in order to press the work W.
Inventors:
Kentaro Saotome
Application Number:
JP36503498A
Publication Date:
March 09, 2005
Filing Date:
December 22, 1998
Export Citation:
Assignee:
Toshiba Ceramics Co., Ltd.
International Classes:
B24B37/005; B24B37/04; B24B37/30; (IPC1-7): B24B37/00; B24B37/04
Domestic Patent References:
| JP7223728A |
Foreign References:
| US4507834 |
Attorney, Agent or Firm:
Hisashi Hatano
Shunguchi Sekiguchi
Shunguchi Sekiguchi
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