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Title:
ELECTRIC INSPECTION DEVICE FOR INSPECTION OF ELECTRIC OBJECT TO BE INSPECTED
Document Type and Number:
Japanese Patent JP2008209408
Kind Code:
A
Abstract:

To provide an electric inspection device which can test surely an electric object to be inspected under an extreme inspection condition.

In the electric inspection device 1 for the inspection of the electric object 2 to be inspected, preferably a wafer 3, the electric inspection device comprises at least an electric contact system 5 and at least an electric connection device 7 equipped with at least an electric/electronic part 16. The electric connection device is equipped with a contact surface 13 for carrying out touch contact of the contact system 5 which can contact the electric object 2 to be inspected, and the electric connection device 7 has a wiring substrate 9 and a connection element 8. The electric/electronic part 16 exists in internals/surface of the connection element 8.


Inventors:
BOEHM GUENTHER
STOLP PETER
STEIDLE GEORG
Application Number:
JP2008027837A
Publication Date:
September 11, 2008
Filing Date:
February 07, 2008
Export Citation:
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Assignee:
FEINMETALL GMBH
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
JP2003107105A2003-04-09
JP2000227443A2000-08-15
JPH10132855A1998-05-22
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Tsuyoshi Oshio



 
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