Title:
ELECTRIC PART, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2014184536
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electric component including an MEMS device having a structure with desired characteristics.SOLUTION: An electric component as an embodiment includes a substrate and an MEMS device provided on the circuit board. The MEMS device includes: a first electrode fixed on the substrate; a second electrode above the first electrode so as to be opposed to the first electrode, and vertically movable; an anchor part provided on the substrate and supporting the second electrode; and a spring part formed extending from a top face of the second electrode to a top face of the anchor part and connecting the second electrode with the anchor part. The electric component as the embodiment further includes a reinforcement member 24 provided on an under surface and reinforcing strength of the spring part.
Inventors:
YAMAZAKI HIROAKI
Application Number:
JP2013062591A
Publication Date:
October 02, 2014
Filing Date:
March 25, 2013
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B81B3/00; B81C1/00; H01G5/16; H01H11/00; H01H59/00
Domestic Patent References:
| JP2011066150A | 2011-03-31 | |||
| JP2004261884A | 2004-09-24 | |||
| JP2006269127A | 2006-10-05 | |||
| JP2007214039A | 2007-08-23 | |||
| JP2012191052A | 2012-10-04 | |||
| JP2011066156A | 2011-03-31 | |||
| JP2012196041A | 2012-10-11 | |||
| JP2010135634A | 2010-06-17 | |||
| JP2004181552A | 2004-07-02 |
Foreign References:
| US20070278075A1 | 2007-12-06 | |||
| US7299538B2 | 2007-11-27 |
Attorney, Agent or Firm:
Patent business corporation スズエ international patent firm
Previous Patent: ANNULAR RESIN PRODUCT ASSEMBLY METHOD AND ANNULAR RESIN PRODUCT
Next Patent: ARM OPERATION METHOD AND ARM OPERATION DEVICE
Next Patent: ARM OPERATION METHOD AND ARM OPERATION DEVICE