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Title:
ELECTRO-OPTICAL DEVICE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2011186078
Kind Code:
A
Abstract:

To enhance light resistance while allowing the reduction in manufacturing costs, in an electro-optical device.

The electro-optical device is equipped with, on a substrate (10): a TFT (30) provided correspondingly to a pixel electrode (9); an upper light shielding film (6c) for covering a channel region of the TFT from above; an interlayer insulating film with a multilayer structure, which is provided between the upper shielding film and the TFT and in which a contact hole (81c) for electrically interconnecting the upper light shielding film and the TFT is formed and a recess (501h) is formed above the TFT; and at least one piece of stopper films (500) which is provided between a plurality of films constituting the multilayer structure and is formed at a bottom of the recess or the circumference of the bottom. The upper light shielding film includes a wall section (6w) formed in the recess.


Inventors:
IIZUKA SHOTA
Application Number:
JP2010049678A
Publication Date:
September 22, 2011
Filing Date:
March 05, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G09F9/30; G09F9/00
Domestic Patent References:
JP2009186877A2009-08-20
JP2000267131A2000-09-29
JP2009053479A2009-03-12
JP2003140566A2003-05-16
JP2008225451A2008-09-25
JP2005215646A2005-08-11
Attorney, Agent or Firm:
Tatsuo Egami
Satoshi Nakamura