Title:
ELECTROCHEMICAL SENSOR, WORKING ELECTRODE THEREFOR AND METHOD FOR MEASURING ELECTROPLATING SOLUTION
Document Type and Number:
Japanese Patent JP2019211324
Kind Code:
A
Abstract:
To suppress the size of an electrochemical sensor which is brought into contact with an electroplating solution and to reduce the manufacturing cost.SOLUTION: An electrochemical sensor 2 brought into contact with an electroplating solution includes: a working electrode 21 for causing a redox reaction of a redox reactant material with the electroplating solution; a reference electrode 22 for controlling a potential of the working electrode 21; and a counter electrode 23 for detecting a current flowing through the working electrode 21. The working electrode 21 is formed so as to become smaller up to the size in establishment of relationship in which a transfer coefficient of the redox reactant material increases as an area of a contact surface 21a of the working electrode 21 between the electroplating solution and the working electrode 21 decreases.SELECTED DRAWING: Figure 2A
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Inventors:
NAKAYAMA NAOTO
Application Number:
JP2018107299A
Publication Date:
December 12, 2019
Filing Date:
June 04, 2018
Export Citation:
Assignee:
HIOKI ELECTRIC WORKS
International Classes:
G01N27/30; G01N27/416
Attorney, Agent or Firm:
Goto Patent Office