Title:
電気銅めっき液の分析装置
Document Type and Number:
Japanese Patent JP5218359
Kind Code:
B2
Abstract:
Effective fillability and the uniformity electrodeposition of a copper electroplating solution is judged by determining the time-dependent potential change thereof at a cathode current density of 0.1-20 A/dm2. The potential change is determined at a working electrode rotation of 100-7500 rpm, and the fillability with the solution is judged from the curve profile. In an embodiment of the present invention, the fillability is judged by obtaining the potential change speed in the initial stage of electrolysis and the potential convergent point from the time-dependent potential change curve for a predetermined period of time after the start of the electrolysis.
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Inventors:
Toshikazu Okubo
Naoi Katsumi
Yuka Mizuno
Naoi Katsumi
Yuka Mizuno
Application Number:
JP2009224533A
Publication Date:
June 26, 2013
Filing Date:
September 29, 2009
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
C25D21/12; G01N27/416; G01N27/42
Domestic Patent References:
| JP5080028A | ||||
| JP2002167689A | ||||
| JP4534983B2 |