ELECTRODE FOIL

Japanese Patent JP3548583

B2

PURPOSE: To obtain an electrode foil which can achieve a high capacity by a method wherein, in the electrode foil formed by installing Ti layers on one face or on both faces of a conductive foil, the Ti layers contain N element and one or more kinds of elements out of O, C, H, F and B at specific values or higher in atomic %.
CONSTITUTION: A Ti film to which N element and one simple-substance element out of O, C, H, F and B have been added is formed on an aluminum foil. The capacitance of the Ti film on a smooth aluminum foil is very low. However, as the addition amount of all the added elements is increased, the capacitance is increased. After the capacitance has displayed a maximum value at 30 to 50 atomic %, it is decreased. However, it is recognized that, up to about 70 atomic %, the capacitance exceeds a value of 200μF/cm2 of a Ti film formed by a vapor deposition in an argon gas atmosphere. The capacitance is increased more remarkably in a film to which the N element and one simple-substance element out of O, C, H, F and B have been added than a case where N element as a simple substance is added. It is found that the film is more predominant than the case where the N element as the simple substance is added.

Ken Momono
Kabun Ota
Masahiro Matsumoto
Hiroaki Kawamura
Hideo Takei
Miue Ikuta
Hisazo Nakamura

JP10990692A

July 28, 2004

April 28, 1992

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ULVAC, Inc.

C23C14/06; C23C14/08; C23C14/16; H01G9/04; H01G9/042; H01G9/055; (IPC1-7): H01G9/055; C23C14/08; H01G9/042

JP5190399A

Shigeru Yagida
Takao Hamano
Morita Tetsuji
Teruichi Hirai

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