MANUFACTURE OF ELECTRODE FOIL

Title:

MANUFACTURE OF ELECTRODE FOIL

Document Type and Number:

Japanese Patent JP3548584

Kind Code:

B2

Abstract:

PURPOSE: To provide a manufacturing method of an electrode foil whereby the size of a capacitor, especially an electrolytic capacitor, is made small and the capacity of the capacitor is made high.
CONSTITUTION: The inside of a vacuum tank 1 as a whole is kept at a stationary pressure atmosphere by an inert gas. While, in it, one or more kinds of reactive gases containing nitrogen and carbon are being jetted by the use of nozzles 10 toward a conductive foil substrate 8 from parts near the conductive foil substrate, a Ti film is formed by a vapor deposition operation.

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Inventors:

Ken Momono
Kabun Ota
Masahiro Matsumoto
Hiroaki Kawamura
Hideo Takei
Miue Ikuta
Hisazo Nakamura

Application Number:

JP10993292A

Publication Date:

July 28, 2004

Filing Date:

April 28, 1992

Export Citation:

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Assignee:

ULVAC, Inc.

International Classes:

C23C14/16; H01G9/04; H01G9/055; (IPC1-7): H01G9/055; C23C14/16

Domestic Patent References:

JP4196208A

Attorney, Agent or Firm:

Shigeru Yagida
Takao Hamano
Morita Tetsuji
Teruichi Hirai

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