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Title:
ELECTRODE STRUCTURE
Document Type and Number:
Japanese Patent JP2010074173
Kind Code:
A
Abstract:

To provide electrode structure for suppressing generation of cracks.

Anchor hole 52 which opens the surface of wiring 45 covered by a sacrificial film 51 and a nitride film 47, is formed. The anchor hole 52 is constituted of a hole 47c which the nitride film 47 has and an opening 51a of the sacrificial film 51. The hole 47c opens by entering inside the wiring 45 by first predetermined distance d1 from the edge 45a on the surface of the wiring 45. The opening 51a opens by retreating from the hole 47c by second predetermined distance d2. By existence of the first predetermined distance d1, occurrence of peeling is suppressed.


Inventors:
HORIKAWA MAKIO
ISHIBASHI KIYOSHI
OKUMURA MIKA
Application Number:
JP2009234186A
Publication Date:
April 02, 2010
Filing Date:
October 08, 2009
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L29/84; B81B3/00; G01P15/125
Domestic Patent References:
JPS63161648A1988-07-05
JPH09129896A1997-05-16
JPH07283314A1995-10-27
JPH02224336A1990-09-06
JPH0689893A1994-03-29
JPH09304207A1997-11-28
JP2000332108A2000-11-30
JPH07297371A1995-11-10
JPH11281509A1999-10-15
JP2000187242A2000-07-04
JPS63161648A1988-07-05
JPH09129896A1997-05-16
JPH07283314A1995-10-27
JPH10209210A1998-08-07
Foreign References:
US5661081A1997-08-26
US5661081A1997-08-26
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita



 
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