Title:
電磁波、特に赤外線の検出器、及びこの検出器の製造方法
Document Type and Number:
Japanese Patent JP7023964
Kind Code:
B2
Abstract:
An infrared radiation detector includes an array of elementary imaging bolometric detectors, each of the elementary bolometric detectors being formed of a bolometric membrane including a film made of vanadium oxide VOx, having a resistivity in the range from 6 ohm·cm to 50 ohm·cm, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors. The detector includes at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector, and includes a hermetically-sealed cavity having said array and said at least one getter housed therein, having an upper cap including a window transparent to infrared radiation, said cap being sealed by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure.
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Inventors:
Sebastian Cortial
Marc Gill Aumont
Duni perrin
Xavier Zucchi
Marc Gill Aumont
Duni perrin
Xavier Zucchi
Application Number:
JP2019534962A
Publication Date:
February 22, 2022
Filing Date:
December 29, 2017
Export Citation:
Assignee:
Comissaria Allenergy Atmic Eo Zenerji Zartana Tave
Ulysses
Ulysses
International Classes:
H04N5/33; B81B7/02; B81C3/00; G01J1/02; H01L37/00
Domestic Patent References:
| JP2006126203A | ||||
| JP9257565A | ||||
| JP2009289838A |
Foreign References:
| WO2016024946A1 | ||||
| WO2011027774A1 |
Attorney, Agent or Firm:
Murayama Yasuhiko
Shinya Mihiro
Tatsuhiko Abe
Shinya Mihiro
Tatsuhiko Abe