Title:
電子ビーム描画方法
Document Type and Number:
Japanese Patent JP4156182
Kind Code:
B2
Inventors:
Wakimoto Osamu
Application Number:
JP2000223601A
Publication Date:
September 24, 2008
Filing Date:
July 25, 2000
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
| JP2252230A | ||||
| JP4129212A | ||||
| JP10242027A |
Attorney, Agent or Firm:
Fujiharu Ijima
Nobushige Samejima
Nobushige Samejima