PURPOSE: To uniformly control a sample temperature in inert gas atmosphere by placing a sample to be irradiated on a support base within an irradiation vessel, and circulating a heated inert gas within the vessel.
CONSTITUTION: The vessel 1 has a double airtight structure consisting of inner and outer vessels 3, 4, and can be evacuated to vacuum. The vessel 3, which is not of airtight structure but used for heating a sample 2 to be irradiated, has a sample support base 7 formed out of a heat resisting thin film or mesh in the center. When the sample 2 is irradiated with electron beam, the lid of the vessel 4 is opened to place the sample 2 on the support base 7, the lid is closed to lay the vessel 4 into the sealed state, and a current is then applied to a electric heater 8 to heat the atmospheric gas in the vessel 1. A blower 9 is also operated to circulate the heated gas in the vessel 4, and the vessel internal temperature and the sample temperature are raised to a prescribed temperature. After it is detected and confirmed by a temperature detection control system 14 that the sample temperature reaches the prescribed temperature, and is held, the electron beam is radiated onto the sample 2 through the electron beam incident window in the head part of the vessel 4 and the electron beam incident window 6 of the vessel 3.
SEGUCHI TADAO
SUNAGA HIROMI
TAKIZAWA HARUKI
