Title:
ELECTRONIC BEAM WELDING DEVICE AND ORIFICE
Document Type and Number:
Japanese Patent JP2017060961
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electron beam welding device which inhibits sputter molecules from flowing into a vacuum chamber having a filament.SOLUTION: An electron gun part (110) included in an electron beam welding device (100), includes: a first vacuum chamber (VC1); a second vacuum chamber (VC2) which is connected with the first vacuum chamber (VC1) through a first opening (151), and provided closer to the sample chamber (120) side than the first vacuum chamber (VC1); and a first orifice (171) provided at the first opening (151). The first orifice (171) has a hole (171a) which inhibits sputter molecules (M1 to M4) generated from welding objects (W1, W2) when an electronic beam (140) is radiated to the welding objects (W1, W2) from flowing from the second vacuum chamber (VC2) to the first vacuum chamber (VC1).SELECTED DRAWING: Figure 1
Inventors:
NAKAJIMA TORU
KODAMA KOZO
ONO HARUHIKO
KODAMA KOZO
ONO HARUHIKO
Application Number:
JP2015186825A
Publication Date:
March 30, 2017
Filing Date:
September 24, 2015
Export Citation:
Assignee:
NIPPON ELECTRIC ENG
International Classes:
B23K15/06; B23K15/00
Attorney, Agent or Firm:
Ken Ieiri