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Patent Searching and Data


Title:
ELECTRON EMITTING ELEMENT, ITS MANUFACTURE, ELECTRON SOURCE USING ELECTRON EMITTING ELEMENT AND IMAGE FORMING DEVICE
Document Type and Number:
Japanese Patent JP2000243324
Kind Code:
A
Abstract:

To reduce the aging effect of electron emission efficiency during driving even when a glass substrate containing a component other than SiO2 is used by generating a cover layer mainly made of SiO2 on a no-alkali glass base to obtain a substrate forming an electron emitting element.

A no-alkali glass base 1, which has the content of an alkaline metal except for quartz glass preferably 0.1% or below and has small electric conductivity in the movement of alkaline metal ions, is used, and a cover layer 6 mainly made of SiO2 is formed on its surface by the vacuum deposition method or sputtering method. The alkaline metal content in the cover layer 6 is set to 1/10 or below of the alkaline metal content in the no-alkali glass. The material of opposite element electrodes 2, 3 is selected from a transparent conductor or a semiconductor material such as polysilicone. An electron emission section 5 is constituted with a gap formed at part of a conductive film 4 made of the step coverage between the element electrodes 2, 3 or the resistance value between the element electrodes 2, 3 in a forming process.


Inventors:
MIYATA HIROKATSU
Application Number:
JP3795699A
Publication Date:
September 08, 2000
Filing Date:
February 17, 1999
Export Citation:
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Assignee:
CANON KK
International Classes:
H01J9/02; H01J1/316; H01J29/04; H01J31/12; (IPC1-7): H01J31/12; H01J9/02
Attorney, Agent or Firm:
Keisuke Watanabe (1 person outside)