Title:
ELECTRON GUN AND ELECTRON BEAM SYSTEM
Document Type and Number:
Japanese Patent JP2005235605
Kind Code:
A
Abstract:
To solve the problem that a filament and a cathode are not electrically insulated in a satisfactory manner.
In an electron gun having the cathode and the filament to heat the cathode by thermion, the cathode and the filament are insulated by an insulator including boron nitride.
Inventors:
NAKANO KATSUSHI
Application Number:
JP2004043875A
Publication Date:
September 02, 2005
Filing Date:
February 20, 2004
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01J37/075; (IPC1-7): H01J37/075
Attorney, Agent or Firm:
Takao Watanabe
Keiji Osawa
Keiji Osawa