Title:
ELECTRON SOURCE
Document Type and Number:
Japanese Patent JP2011146138
Kind Code:
A
Abstract:
To provide an electron source capable of being heated to a desired temperature at low voltage and low power, and capable of obtaining stable high current density.
The electron source is equipped with an insulating base, a support mounted on the base, an electron emission part, and a spacer which holds the electron emission part and electrically connects the electron emission part to the support. While the spacer is made of pyrolytic graphite, a metallized layer is formed on the surface of the spacer except for contact surfaces with the electron emission part and the support. The metallized layer is not formed on the contact surfaces cited above.
Inventors:
TATSUMI NATSUO
UEDA AKIHIKO
NISHIBAYASHI YOSHIKI
IMAI TAKAHIRO
UEDA AKIHIKO
NISHIBAYASHI YOSHIKI
IMAI TAKAHIRO
Application Number:
JP2010003670A
Publication Date:
July 28, 2011
Filing Date:
January 12, 2010
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H01J37/073; H01J1/20; H01J1/26
Attorney, Agent or Firm:
Minoru Nakano
Osamu Komura
Masahiro Tagawa
Daisuke Ogata
Osamu Komura
Masahiro Tagawa
Daisuke Ogata
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