Title:
電子デバイス、電子機器および移動体
Document Type and Number:
Japanese Patent JP6476869
Kind Code:
B2
Abstract:
A physical quantity sensor includes a first sensor element, an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, in which a first groove portion extending in a first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.
More Like This:
Inventors:
Satoru Tanaka
Application Number:
JP2015000681A
Publication Date:
March 06, 2019
Filing Date:
January 06, 2015
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01P15/08; G01C19/5783; G01P15/125; G01P15/18; H01L29/84
Domestic Patent References:
| JP2010276508A | ||||
| JP2000187040A | ||||
| JP2009014488A | ||||
| JP2013062339A | ||||
| JP2004530134A | ||||
| JP2015206746A |
Foreign References:
| US6257060 |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuaki Watanabe
Satoshi Nakai
Kazuo Asahi
Kazuaki Watanabe
Satoshi Nakai