Title:
INERTIA FORCE SENSOR AND METHOD FOR PRODUCING INERTIA FORCE SENSOR
Document Type and Number:
WIPO Patent Application WO/2000/042666
Kind Code:
A1
Abstract:
An inertia force sensor comprising a mass body (11) displaced when a force is applied to the mass body (11), at least one holding beam (12) holding the mass body (11), and a fixing section (13) fixing one end of the holding beam (12) so as to sensing the inertia force acting on the mass body (11) based on the displacement of the mass body (11), characterized in that the mass body (11) has a hollow structure made by removing the inside of a silicon substrate (1) by one process of etching, and the fixing section (13) is at least a part of the main body of the silicon substrate (1). Since the inertia force sensor is made of single crystal silicon, the mechanical characteristics and reliability are greatly imporoved.
Inventors:
OHJI HIROSHI (JP)
TSUTSUMI KAZUHIKO (JP)
FRENCH PATRICK J (NL)
TSUTSUMI KAZUHIKO (JP)
FRENCH PATRICK J (NL)
Application Number:
PCT/JP1999/000078
Publication Date:
July 20, 2000
Filing Date:
January 13, 1999
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
OHJI HIROSHI (JP)
TSUTSUMI KAZUHIKO (JP)
FRENCH PATRICK J (NL)
OHJI HIROSHI (JP)
TSUTSUMI KAZUHIKO (JP)
FRENCH PATRICK J (NL)
International Classes:
B81C1/00; G01L1/00; G01L9/00; G01P15/00; G01P15/08; G01P15/09; G01P15/12; G01P15/125; (IPC1-7): H01L29/84; G01L9/04; G01P15/12; G01P15/125
Foreign References:
| JPH0715019A | 1995-01-17 | |||
| JPH08236785A | 1996-09-13 | |||
| JPH08236789A | 1996-09-13 | |||
| JPH04323566A | 1992-11-12 |
Other References:
See also references of EP 1087445A4
Attorney, Agent or Firm:
Aoyama, Tamotsu (Shiromi 1-chome Chuo-ku, Osaka-shi Osaka, JP)
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