電子デバイスおよびその製造方法

Title:

電子デバイスおよびその製造方法

Document Type and Number:

Japanese Patent JP5494038

Kind Code:

B2

Abstract:

An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.

Inventors:

Tadashi Nakatani
Hiroaki Inoue
Hitoshi Yamada
Ueda Tomofumi

Application Number:

JP2010055045A

Publication Date:

May 14, 2014

Filing Date:

March 11, 2010

Export Citation:

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