Title:
電子デバイスおよびその製造方法
Document Type and Number:
Japanese Patent JP6805633
Kind Code:
B2
Abstract:
An electronic device includes: a substrate that includes a first penetration hole; a first electrode that is located on a first surface of the substrate so as to cover the first penetration hole; and a first penetrating electrode that is located in the first penetration hole and is in contact with or away from the first electrode depending on temperature.
Inventors:
Shoichi Miyahara
Embankment Akatsuki
Hideki Kitada
Embankment Akatsuki
Hideki Kitada
Application Number:
JP2016164051A
Publication Date:
December 23, 2020
Filing Date:
August 24, 2016
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01K5/56; H01L21/3205; H01L21/768; H01L21/822; H01L23/522; H01L27/04
Domestic Patent References:
| JP6050824A | ||||
| JP2009182197A | ||||
| JP2013232481A | ||||
| JP2014049732A |
Attorney, Agent or Firm:
Shuhei Katayama