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Title:
ELECTROSTATIC ACTUATOR
Document Type and Number:
Japanese Patent JP2003244972
Kind Code:
A
Abstract:

To provide an electrostatic actuator wherein a dielectric voltage between driving electrodes is high and high thrust force is achievable.

In the electrostatic actuator having at least a stator wherein a plurality of the driving electrodes and an insulating membrane formed to cover the driving electrodes are includes, on the substrate surface of the stator, and an object or a displacing piece disposed on the stator is displaced by applying voltages to the driving electrodes, an actual area of such a portion as constituted, when both ends of the driving electrodes are mutually adjacent in an interface between the substrate and the insulating membrane is connected is arranged larger than an area of a plane quadrangle constituted when the both ends of the electrodes are linearly connected.


Inventors:
ASO YUJI
KIYOHARA MASAKATSU
SHINOHARA SHINJI
Application Number:
JP2002044638A
Publication Date:
August 29, 2003
Filing Date:
February 21, 2002
Export Citation:
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Assignee:
TOTO LTD
International Classes:
B81B5/00; H02N1/00; (IPC1-7): H02N1/00; B81B5/00
Domestic Patent References:
JPH07322644A1995-12-08
JP2000209877A2000-07-28
JPH04340371A1992-11-26
JP2001010052A2001-01-16
JP2001026000A2001-01-30
JPH06153535A1994-05-31



 
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