PURPOSE: To easily work an electrostatic actuator by composing a movable element of a conductive material, and disposing a dielectric layer on the surface of the element to simplify the construction.
CONSTITUTION: An electrostatic actuator is composed of stators 10a∼10c, and movable elements 30a, 30b. An electrode pattern 20 made of a conductor is formed at a predetermined interval on the stator 10, and a dielectric pattern 40 is formed at a pitch to become 1:1.16 ratio with the pattern 20 of the stator 10 is also formed on the element 30. The interval (d) of the electrode 20 of the stator 10 and the pattern 40 of the element 30 is held at 0.1∼0.2mm, and all the elements 30 are supported integrally movably in directions of arrows A, B, as shown. Thus, in order to move the element 30, a predetermined pulselike voltage is sequentially applied in a moving direction to the electrodes 20 of the stator 10 to draw the element 30 between the electrodes to which the voltage is applied.
KAWAKAMI EIGO
YUASA SATOSHI
NIIBE MASATO
KOMATA TOMOJI
YONEDA HIROSHI
WATANABE NOBUO
NOSE HIROYASU
YANO TETSUYA
