Title:
ELECTROSTATIC CAPACITANCE TYPE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2011247659
Kind Code:
A
Abstract:
To reduce the diameter of an electrostatic capacitance type pressure sensor.
The electrostatic capacitance type pressure sensor includes: a body part 21 to which a diaphragm is joined; a fixed electrode 22 to be inserted into an electric fixing hole 211 formed on the body part 21; a guard electrode 23 having a small diameter part 23a and a large diameter part 23c; a first sealing glass 24 for coupling the large diameter part 23c of the guard electrode 23 and the fixed electrode 22; a second sealing glass 25 for coupling the small diameter part 23a of the guard electrode 23 and the body part 21.
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| JP5542603 | A package for pressure sensing, and a pressure sensing device |
| WO/1995/008752 | SCREENED CAPACITIVE SENSOR |
| JPS57137831 | CAPACITIVE PRESSURE DETECTOR |
Inventors:
HATAITA TAKEHISA
KISHIDA SOTARO
KUWAHARA AKIRA
KISHIDA SOTARO
KUWAHARA AKIRA
Application Number:
JP2010118967A
Publication Date:
December 08, 2011
Filing Date:
May 25, 2010
Export Citation:
Assignee:
HORIBA LTD
International Classes:
G01L9/12
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Saito Shindai
Akiko Sato
Saito Shindai
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