Title:
ELLIPSOMETER
Document Type and Number:
Japanese Patent JPH04294226
Kind Code:
A
Abstract:
PURPOSE:To quickly measure the index of refraction (n) and the thickness (d) of a thin film without requiring complicate operations and to easily make alignment of an optical axis. CONSTITUTION:Infrared light from a light emitting part 1a and visible light from a light emitting part 1b are made to impinge on the surface of a sample 4 through an infrared light transmitting and visible light reflecting mirror 1c and a polarizer 2. The optical axis is aligned by the visible light. Meanwhile, reflecting light from the sample 4 is directed onto a photodetecting part 6 through a rotary analyzer 5, so that only the infrared light is detected. Accordingly, the angle PSI and the phase difference delta of the elliptically polarized light can be obtained.
Inventors:
YOSHIOKA YOSHIFUMI
Application Number:
JP5906191A
Publication Date:
October 19, 1992
Filing Date:
March 22, 1991
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01B11/06; G01J4/04; G01N21/21; (IPC1-7): G01B11/06; G01J4/04; G01N21/21
Attorney, Agent or Firm:
Yoshiaki Nishioka