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Title:
EMISSION GAS DECOMPOSING APPARATUS FOR PLASMA-UTILIZING CLEANING
Document Type and Number:
Japanese Patent JP2006159008
Kind Code:
A
Abstract:

To decompose environmental pollutants emitted in plasma-utilizing cleaning, near their sources of release.

In an apparatus generating plasma between opposing electrodes P1 and P2, a part or the whole of the wall partitioning the plasma-generating chamber 10K is formed as a transmissive wall 10b capable of transmitting UV rays generated in plasma generation. Titanium oxide 30 is arranged at such a position as to receive the UV rays transmitted through the transmissive wall and lie in the middle of the emission passage for a gas containing the emission gas generated in cleaning an article 20 under the action of plasma.


Inventors:
ANDO YOSHIAKI
Application Number:
JP2004350691A
Publication Date:
June 22, 2006
Filing Date:
December 03, 2004
Export Citation:
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Assignee:
ATOMU GIKEN KK
International Classes:
B01D53/86; B01J35/02
Attorney, Agent or Firm:
Toshiro Ochi