Title:
ENCLOSED TYPE CONTAINER FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JP3191392
Kind Code:
B2
Abstract:
PURPOSE: To provide an enclosed type container for a clean room which is' not required to move to an inert gas purge station for the gas replenishment,. and is used in a semiconductor manufacturing system capable of reducing the system load.
CONSTITUTION: In an enclosed type container 10 where wafers are stored, and the inside is made in the inert gas atmosphere, and which is carried from the device to the device of the semiconductor manufacturing system, the container is provided with a gas passage hole 31 one end of which is open to the inside while the other end of which is open to the outside, and a portable inert gas cylinder 20 is mounted on the other end part of this gas passage hole in a removable manner, where the inert gas cylinder is used for gas replenishment for the gas leakage from the container.
Inventors:
Teppei Yamashita
Masanao Murata
Miki Tanaka
Hiya Morita
Kawano et al.
Atsushi Okuno
Masanori Tsuda
Mitsuhiro Hayashi
Masanao Murata
Miki Tanaka
Hiya Morita
Kawano et al.
Atsushi Okuno
Masanori Tsuda
Mitsuhiro Hayashi
Application Number:
JP8441192A
Publication Date:
July 23, 2001
Filing Date:
April 07, 1992
Export Citation:
Assignee:
Shinko Electric Co., Ltd.
International Classes:
B65D88/12; B65D81/20; B65D85/38; B65D85/86; B65G49/00; B65G49/07; F24F7/007; H01L21/02; H01L21/673; (IPC1-7): H01L21/68; B65D81/20; B65D85/86; F24F7/007
Domestic Patent References:
| JP457780A | ||||
| JP296348A | ||||
| JP1207944A | ||||
| JP298640U | ||||
| JP56129824U |
Attorney, Agent or Firm:
Yoshiyuki Kaji (1 person outside)